JICCE (한국정보통신학회)
Current Result Document :
| 한글제목(Korean Title) |
A Feasibility Study of Nano-grained ZnO Piezoelectric Thin Film Fabrication |
| 영문제목(English Title) |
A Feasibility Study of Nano-grained ZnO Piezoelectric Thin Film Fabrication |
| 저자(Author) |
Ruirui Zhang
Eunju Lee
Giwan Yoon
|
| 원문수록처(Citation) |
VOL 07 NO. 04 PP. 0530 ~ 0534 (2009. 12) |
한글내용
(Korean Abstract) |
|
영문내용
(English Abstract) |
C-axis-oriented ZnO thin films were successfully deposited on p-Si (100) in an RF magnetron sputtering system. Deposition conditions such as deposition power, working pressure, and oxygen gas ratio O₂/(O₂ Ar) were varied. Crystalline structures of the deposited ZnO films were investigated by a scanning electron microscope (SEM) technique. Results show that the deposition parameters can have a strong impact on the preferred orientations and grain sizes of the deposited ZnO films. |
| 키워드(Keyword) |
C-axis orientation
Grain size
RF Magnetron sputtering
ZnO thin film
|
| 파일첨부 |
PDF 다운로드
|
